MKS P Series Mass Flow Controllers

Описание: P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.

The P-Series MFCs, with full scale ranges from 5 sccm to 250 slm (Nitrogen equivalent) are designed for critical mass flow applications like those required in semiconductor and high end MOCVD applications. Its 1.125" width is designed for use in compact and modular gas panels. In addition to its multi-gas, multi-range capabilities, the P-Series (P9 model) with its integral pressure transducer, offers a pressure insensitive capability that maintains tight flow control in the event of an upstream pressure disturbance.

The P-Series MFCs' multi-gas, multi-range capabilities are enabled with gas parameters already stored in memory, providing tight and repeatable flow accuracy for the selected gas. An Ethernet interface facilitates changes in device range and gas, as well as remote performance monitoring. Most controllers are metal sealed and electropolished for high purity applications, and are available in a broad range of interfaces, including RS485, Profibus and Devicenet.

Learn more: https://www.mks.com/c/p-series-mass-f...

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About MKS Inc.
MKS Inc. enables technologies that transform our world. We deliver foundational technology solutions to leading edge semiconductor manufacturing, electronics and packaging, and specialty industrial applications. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, electronic control technology, reactive gas generation and delivery, power generation and delivery, and vacuum technology. Our solutions are critical to addressing the challenges of miniaturization and complexity in advanced device manufacturing by enabling increased power, speed, feature enhancement, and optimized connectivity. Our solutions are also critical to addressing ever-increasing performance requirements across a wide array of specialty industrial applications. www.mks.com

MKS Inc.
2 Tech Drive
Andover, Massachusetts 01810
USA

Tel: 978-645-5500
Fax: 978-557-5100
[email protected]
www.mks.com