Principles of Vacuum Measurement

Описание: Pressure is a key parameter in all modern vacuum-based production processes. This webinar provides you with an overview of the various approaches to measure pressure down to 14 orders of magnitude and more below ambient pressure, followed by ​​​​a discussion of the two principle ways to measure vacuum - Direct and Indirect pressure measurement.
MKS Baratron® capacitance manometers are highly accurate and repeatable, insensitive to gas composition, compact, and easily interfaced with most process tools. Take a look at this again. The Baratron is a direct pressure measurement product. Granville Phillips products are indirect pressure. I wouldn't specifically call out out the Baratron if this covers both direct and indirect pressure.

Learn more - https://www.mks.com/c/capacitance-man...
Technical Resources - https://www.mksinst.com/mam/celum/cel...

Baratron Capacitance Manometer Family Brochure https://www.mks.com/medias/sys_master...

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MKS Inc. enables technologies that transform our world. We deliver foundational technology solutions to leading edge semiconductor manufacturing, electronics and packaging, and specialty industrial applications. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, electronic control technology, reactive gas generation and delivery, power generation and delivery, and vacuum technology. Our solutions are critical to addressing the challenges of miniaturization and complexity in advanced device manufacturing by enabling increased power, speed, feature enhancement, and optimized connectivity. Our solutions are also critical to addressing ever-increasing performance requirements across a wide array of specialty industrial applications. www.mks.com

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