Solid State Microwave (SSM) - Frequency change in resonant cavities
Автор: MKS Inc.
Загружено: 2020-09-28
Просмотров: 1422
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Explore the basic concepts of Microwave heating and the differences between Multimodal and Monomodal cavities. Discover the differences between magnetron and solid state solutions. Explore MKS' Microwave Generators and Systems.
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MKS Inc. enables technologies that transform our world. We deliver foundational technology solutions to leading edge semiconductor manufacturing, electronics and packaging, and specialty industrial applications. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, electronic control technology, reactive gas generation and delivery, power generation and delivery, and vacuum technology. Our solutions are critical to addressing the challenges of miniaturization and complexity in advanced device manufacturing by enabling increased power, speed, feature enhancement, and optimized connectivity. Our solutions are also critical to addressing ever-increasing performance requirements across a wide array of specialty industrial applications. www.mks.com
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0:00 Introduction
2:01 Microwave Heating System - Field distribution in a multimodal cavity Typical Industrial Microwave components
4:24 Microwave heating system - SS Vs Magnetron
6:28 Monomodal Cavity design: resonant frequency
7:27 Conventional Magnetron Setup: Limits
9:30 Comparison Standard Magnetron Source vs Solid State Source
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