Nano Stepper HexaPod UHV

Описание: Hexapod for High Vacuum and Ultra Clean environments with completely sealed NSAU actuators.

Janssen Precision Engineering is developing a Hexapod system for Ultra High Vacuum positioning applications, especially set & forget applications. For this the 6 DOF stage has 6 JPE’s Nano Stepper Actuators (NSAU). These actuators comprise a nanometric resolution and can be equipped with incremental or even absolute encoders. For more information about these actuators see http://www.janssenprecisionengineerin... .

http://www.janssenprecisionengineerin...