Schottky Diodes Fabrication On Zn-polar BeMgZnO/ZnO Heterostructure

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Fabrication of Schottky Diodes on Zn-polar BeMgZnO/ZnO Heterostructure Grown by Plasma-assisted Molecular Beam Epitaxy - a 2 minute Preview of the Experimental Protocol

Kai Ding, Vitaliy Avrutin, Natalia Izioumskaia, Md Barkat Ullah, Ümit Özgür, Hadis Morkoç
Virginia Commonwealth University, Department of Electrical and Computer Engineering;

Attainment of high-quality Schottky contacts is imperative for achieving efficient gate modulation in heterostructure field effect transistors (HFETs). We present the fabrication methodology and characteristics of Schottky diodes on Zn-polar BeMgZnO/ZnO heterostructures with high-density two dimensional electron gas (2DEG), grown by plasma-assisted molecular beam epitaxy on GaN templates.

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