For Sale Aixtron GaN MOCVD #04
Автор: Hilco Industrial
Загружено: 2020-10-13
Просмотров: 452
Описание:
https://hilcoeu.auctionserver.net/auc...
Manufacturer: AIXTRON
Model: AIX2800G4 HT
Description: GaN MOCVD
Version: 2 INCH x 42, 4 INCH x 11, 6 INCH x 6
Year: 01.11.2010
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:
In association with fabsurplus.com
-Still installed in the fab.
-Shut down and powered off.
-Can be inspected by appointment
-serial number is 1001-701155
-The equipment is in excellent condition, with no missing parts.
-The equipment was lightly used in an R and D environment for around 2-3 years.
-The equipment ran 4 inch Sapphire wafers
-For the detailed configuration and the gas panel configuration, please refer to the attached photos and PDFs.
Maker AIXTRON Model AIX2800G4 HT
Acquisition Date 2011-10-10 Q’ty 5 EA
Capacity : 6"×6 or 4"×11 or 2"×24
Susceptor dimension : D520mm×T19mm
Chamber coil (9 channels)
Hydride Line : 1xNH3, 2xDopant
Purifier : H2, N2, NH3
Pump : DOR pump(SH-110), Ebara pump(ESA70)
With:
H2 Purifier (IN LINE Type)
Maker TERATECH
Model TPH-LP-500S(100S)
Gas : Hydrogen
Process Methods : Line Purifire
Flow Rate(Nm³/hr) : 10.30.50.75.100.150.300
Impurities Removed : H₂.O₂.H₂O.CO.CO₂
Categories: LED Manufacturing Equipment, FAB MOCVD
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