NACK S12: Fabricating a MEMS Pressure Sensor – You Can Do This!

Описание: 2021.10.08 Matthias Pleil , University of New Mexico

This presentation is part of the NACK - Nano-Educators Topical Seminar Series and can be found at: https://nanohub.org/resources/35662
Information on the NACK Network can be found at: https://www.cneu.psu.edu/ and https://nano4me.org

Table of Contents:
00:00 Fabricating a MEMS Pressure Sensor – You Can Do This!
01:49 What are MEMS Pressure Sensors?
03:07 Why do we care?
05:24 Who Makes These?
06:15 Pressure Sensor Application
08:24 A Cool App for your phone Check out your pressure sensor!
10:34 Pressure Sensor How it Works
12:10 MTTC Pressure Sensor Process Overview
15:40 SCME/MTTC Pressure Sensor Process - Video
19:27 Backside Pattern (Chamber) – Hard Mask
21:04 Photolithography
23:32 Wafer Prep Deposition
24:38 Wafer Prep QDR/SRD Deposition
27:37 Coat
29:35 Expose
31:09 Develop
33:18 Microscope Inspection
34:07 Profilometer Inspection - DekTak
35:29 After Pattern, Before RIE Etch – Profiles
36:58 Program
38:56 After first 5min
39:56 After Etch before Resist Strip
41:27 Etch Inspect
42:03 Selectivity: What you want etched Vs Masking Material
43:15 Backside is now etched
43:44 Frontside Pattern – Dark or Bright Field?
45:42 Karl Suss MA6/BA6
45:46 Backside Alignment Microscopes
47:21 Pattern the Wheatstone Bridge
49:20 Alignment Details
49:51 Photolithography – Liftoff LOR5B
50:49 LOR5b Results - Inspect
51:57 Photolithography – Liftoff nLOF2070
53:45 nLOF2070 Results
54:17 So Far....
55:02 Sputter – CrAu or NiCr
57:14 Load
57:43 Load Wafer in Load Lock
58:40 Sputter Wafer Stage and Target
59:14 Select
59:36 Metal on Photoresist
60:32 Liftoff
62:18 Inspect
62:25 What's Next?
62:28 Chamber Etch – Anisotropic Wet Etching of Silicon in KOH!
64:50 Singulation
65:43 Dicing
67:11 Probe
69:51 • • • • WWW.SCME-SUPPORT.ORG
72:02 NEW: URE - UNDERGRADUATE RESEARCH EXPERIENCE TARGETING 2YR TECHNICIAN STUDENTS WITH THEIR FACULTY!
75:44 MNTESIG COMMUNITY
79:25 Want to Give it a shot?
80:51 QUESTIONS?

This presentation and related downloads can be found on nanoHUB.org at: https://nanohub.org/resources/36242