EUV Hydrogen Dilution

Описание: EUV lithography is helping to enable the high volume manufacture of high precision, integrated circuits. This is increasing the demand for environmentally friendly products whilst maximising our customers productivity.

To reduce customer’s direct emissions, Edwards has developed a solution that moves away from the use of natural gasses in the SubFab and change the way exhaust gas is managed for EUV lithography.

With sustainability in mind, Edwards innovative teams have developed a fuel free alternative to gas fired abatement for EUV – Hydrogen Dilution System or H2D.