From Design to Microstructured Topography: An Overview on Maskless Grayscale Lithography
Автор: Heidelberg Instruments
Загружено: 2022-10-28
Просмотров: 4546
Описание:
From laser material processing, medical applications, optical sensors, spectroscopy, and to optical communication, Heidelberg Instruments' comprehensive range of maskless laser lithography and nanofabrication systems provide a variety of 2.5D and 3D lithography functionalities to target a broad scope of applications.
Grayscale lithography can be used to quickly fabricate various 2.5D structures at the micro scale in positive photoresists, such as:
• diffractive optical elements (DOE)
• diffusers and reflectors
• microlens arrays
• MEMS/MOEMS
• fresnel lenses
• complex micro-optic structures
• computer generated holograms
• complex microfluidics channels
Visit our grayscale lithography page to learn more about our diverse offering: www.heidelberg-instruments.com/key-features/grayscale-lithography
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