Molybdenum (Mo) Has Lower Resistivity Than Tungsten
Автор: Lam Research
Загружено: 2025-04-16
Просмотров: 796
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ALTUS® Halo is designed to address the unique challenges of molybdenum implementation in leading-edge integrated circuit types. ALTUS Halo delivers exceptional feature fill and high-precision deposition of low resistivity, void-free molybdenum metallization for advanced semiconductor devices. ALTUS Halo is optimized for a range of metallization needs with chemistry and thermal flexibility, as well as plasma for temperature-sensitive applications. Molybdenum is the next frontier in semiconductor metallization and a key component for powering the AI era. ALTUS Halo brings these advantages to today's chipmakers.
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