How Antireflective Coatings Work for Semiconductors
Автор: Brewer Science
Загружено: 2014-08-08
Просмотров: 48816
Описание:
Learn how antireflective coatings for semiconductors make it possible for microchip manufacturers to make devices smaller, faster, and more efficient.
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Integrated circuits are manufactured using a complex process called photolithography. Each layer of the circuit is created by exposing a special photosensitive coating (photoresist) with light, and then using the patterned photoresist as a template for building the device.
Semiconductor materials can be highly reflective, which can cause problems when exposing patterns into the photoresist. Bottom antireflective coatings (BARCs) solve these problems by eliminating reflections from underlying materials.
Brewer Science introduced bottom anti-reflective coatings to the semiconductor industry in 1981, and they continue to enable the most cutting-edge lithography process in use today. Without them, things like smartphones and ultrathin notebook computers would not be possible.
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