TEM sample creation using a ThermoFisher G4 Plasma FIB (PFIB)
Автор: Allen Hunter
Загружено: 2020-09-14
Просмотров: 4304
Описание:
This is a recording of the FIB preparation of a silicon based sample for TEM imaging. The work was done at the Michigan Center for Materials Characterization (MC2) by Dr. Allen Hunter. The instrument used for the procedure is a ThermoFisher G4 PFIB UXe plasma fib.
Major sections of the video:
0:00 Introduction
0:43 Alignment of Easylift needle
8:10 Preparing Mo grid
14:50 Locate sample ROI
18:30 Deposit SEM Pt protective capping layers
24:30 Deposit FIB Pt protective layer (~12 minutes are cut from video)
34:30 Regular Cross section cuts
43:00 Cleaning Cross section cuts
53:00 Undercut for liftout
57:22 Cleanup step
58:56 Liftout procedure and attach to Mo grid
1:08:28 Deposit additional welds to secure sample to grid
1:13:25 First thinning cuts at 30 kV
1:18:55 Second thinning cuts at 30 kV
1:24:56 5 kV thinning
1:32:50 2 kV thinning
1:45:30 Finished sample and system venting
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