Alternatives to ASML:BETTER OPTION FROM CHINA 一种新型的光源加速器 稳态微聚束 SSMB-DUV 机制

Описание: 本文有楊振寧老先生的徒弟趙午教授講解SSMB方案的理論基礎，時間為2021年，由清華大學支持！
此方案就是目前中國光刻機光源的理論基礎，趙午教授研究超過40年，楊振寧先生支持，清華大學和德國的大學一起通過了可行性論證和實驗。
如果此方案最終成功，中國將會突破光刻機技術封鎖。

The article features Professor Zhao Wu, a disciple of the esteemed Mr. Yang Zhenning, explaining the theoretical foundation of the SSMB scheme in 2021, supported by Tsinghua University. This scheme serves as the theoretical basis for the current light source of China's photolithography machine. Professor Zhao Wu has been researching for over 40 years, with the backing of Mr. Yang Zhenning. Tsinghua University, in collaboration with universities in Germany, has verified the feasibility and conducted experiments on this scheme。