"Thin Films for Piezoelectric MEMS"

Описание: by Dr. Susan Trolier-McKinstry, Professor of Materials Science and Engineering and Electrical Engineering, Penn State
February 17, 2020
Piezoelectric materials couple electrical and mechanical energies, and as such, offer an interesting platform to study numerous functional properties. Piezoelectric thin films are ubiquitous in filters and duplexers for cell phones and are of increasing interest in low voltage microelectromechanical systems (MEMS) for sensing, actuation, and energy harvesting. This talk will discuss how materials are optimized for these applications, as well as examples of the use of piezoelectric films over a wide range of length scales. The key figures of merit for resonators, actuators, and energy harvesting will be discussed, with emphasis on how to achieve these on practical substrates. Recent work on doped AlN for cell phone resonators will be reviewed. In addition, the roles of crystallographic orientation and domain state will be described for low voltage actuators and mechanical harvesters in thin films with the perovskite structure. Examples of integration into MEMS structures will also be discussed, including adaptive optics for X-ray telescopes, low frequency and non-resonant piezoelectric energy harvesting devices, inkjet printers, and ultrasound transducers for miniaturized medical diagnostics.