SpaceFAB: Hexapod-Like, High-Dynamics 6-Axis Nano-Positioning System
Автор: Physik Instrumente USA - Precision Motion Control
Загружено: 2025-08-21
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Описание:
More: https://www.pi-usa.us/en/news-events/... F-690.S1 SpaceFAB – 6-DOF Parallel-Serial Hybrid Positioning System
The PI F-690.S1 SpaceFAB is a hexapod-like, hybrid-kinematic motorized 6-axis positioning and automation platform engineered for demanding automation tasks in photonics, PIC alignment, optics, metrology, semiconductor test, and micro-assembly.
Design & Kinematics
Architecture: Three symmetrically arranged XY nanopositioning stages with direct-drive linear motors and cross-roller bearings.
Hexapod-Like 6-DOF Mechanism
Each of the 3 XY stages carries a linear bearing mounted on a wedge, coupled via precision ball-joint connections. This hybrid parallel–serial design enables smooth, coordinated 6-degree-of-freedom motion with minimal mechanical crosstalk.
Performance:
--Resolution: 1 nm
--Minimum Incremental Motion: 10 nm (linear), 2 µrad (rotational)
--Repeatability: ±50 nm (XY), ±75 nm (Z), ±2 µrad (rotational)
--Max Speed: 500 mm/s (linear), 100°/s (rotational)
--Travel Ranges
--Linear: XY: 50 mm, Z: 25 mm
--Rotational: θX/θY: ±15°, θZ: ±30°
Load Capacity
--Supports payloads up to 2 kg
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