Rogue Valley Microdevices

Описание: Our MEMS foundry & manufacturing facility contains processing equipment capable of volume manufacturing yet flexible enough to accommodate wafer sizes from 50mm to 300mm. We offer full Device Fabrication and Design services along with a variety of individual processes to support our growing network of satisfied customers.

Our MEMS Foundry Capabilities include Metal Lift off, Front to Back Alignment, Wet and Dry Etch, Low Stress LPCVD Nitride, PECVD Oxide, PECVD Nitride, PECVD Silicon Carbide, PolySilicon, Amorphous silicon, Thermal Oxidation, N2/H2 Annealing, and a variety of PVD films.