Inclined Rotary Plasma Enhanced Chemical Vapor Deposition PECVD Equipment Tube Furnace Machine
Автор: KinTek Solution For Research
Загружено: 2025-08-24
Просмотров: 37
Описание:
The Inclined Rotary Plasma Enhanced Chemical Deposition (PECVD) Tube Furnace Machine is a plasma-enhanced rotary chemical vapor deposition system that uses a rotating furnace tube and plasma generator to induce chemical reactions in a gaseous discharge. This process produces a wide variety of chemical species that can be used to form solid deposits on materials. The machine is equipped with a three-way mass flow meter and a gas mixing device, which allows for precise control of the gases used in the process. The rotating furnace tube ensures uniform heating and mixing of materials, while the plasma generator provides the activation energy needed for chemical reactions. The machine is also equipped with a high-performance mechanical pump that can quickly evacuate the furnace tube to vacuum.
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