High-Precision Air-Bearing Positioning Stage with Yaw-Error Compensation | Nanometer Mechatronics

Описание: High-precision positioning in the nanometer range requires advanced mechatronic systems and extremely accurate measurement technology.
In this video, we present a high-precision air-bearing positioning system consisting of a mechatronic positioning stage and an interferometer for nanometer-level position measurement.
The positioning stage features a special technology for full yaw-error compensation, enabling extremely high accuracy and repeatability even during dynamic motion. This capability is essential for demanding applications in precision engineering, semiconductor manufacturing, and optical metrology.
The contactless air-bearing design enables nearly frictionless motion, minimal wear, and exceptional stability. As a result, the system achieves outstanding positioning performance for high-precision applications.
Such air-bearing mechatronic systems are used in semiconductor production, optical measurement systems, research laboratories, and high-accuracy calibration environments.

🔗 Learn more
JAT – Drive Technology and Mechatronic Systems
https://www.jat-gmbh.de/en/

⚙️ Applications
• Semiconductor manufacturing
• Precision metrology and interferometry
• Research & development
• Optical and photonic systems

⚙️ System highlights
• Air-bearing positioning stage
• Interferometric position measurement
• Full yaw-error compensation
• Nanometer-level positioning accuracy

🏢 About JAT
JAT develops customized drive technology, automation solutions, and high-precision mechatronic systems for demanding industrial and research applications.

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#PrecisionEngineering
#NanometerPositioning
#Mechatronics
#SemiconductorTechnology
#OpticalMetrology